Resumen de Run-to-Run Process Adjustment Using Categorical Observations
Qualitative observations can be utilized when quality characteristics cannot be measured on a continuous scale. However, most run-to-run process control algorithms that are developed based on quantitative measurement cannot be implemented in such situations. A run-to-run control scheme is developed that uses qualitative information for process adjustments. A two-phased modeling and adjustment strategy is proposed and demonstrated by an example from a deep reactive ion etching process.
