Identification of an equivalent model for the permanent magnets of a magnetron sputtering device

• Daniele Desideri ^[2] ; Alvise Maschio ^[2] ; Dan Doru Micu ^[1] ; Olivia Ramona Miron ^[1]
  1. [1] Technical University of Cluj-Napoca

     Technical University of Cluj-Napoca

     Rumanía

     
  2. [2] University of Padova
• Localización: Compel: International journal for computation and mathematics in electrical and electronic engineering, ISSN 0332-1649, Vol. 31, Nº 2 (Special Issue: ARWtr conference Spain), 2012, págs. 514-527
• Idioma: inglés
• Enlaces
  • Texto completo
• Resumen

  • Purpose – The aim of the work was to obtain an auxiliary instrument able to give the magnetic configuration of a magnetron sputtering device for operation with targets, magnetic and non magnetic, with different heights, starting from a device with no detailed information of the source.

    Design/methodology/approach – An inverse problem has been dealt with. A 2D numerical analysis has been performed, which utilizes as a starting point a model identified with a simple analytical procedure based on measurements.

    Findings – A satisfactory equivalent model has been identified, and validated in several different conditions.

    Originality/value – The proposed approach can be applied when no detailed information of the source is available, in the case of a cathode without a ferromagnetic yoke.