Nuevas técnicas para el diseño y realización de electrodos concentrados de dispositivos ópticos integrados

• Autores: José Miguel López Higuera, Manuel López-Amo Sainz, José Luis Arce Diego
• Localización: VII Congreso de Diseño de Circuitos Integrados: 3, 4 y 5 de noviembre de 1992, Toledo, España : actas, 1992, págs. 529-530
• Idioma: español
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• Resumen

  • In order to carry out designs and fabrications of lumped electrodes for high-electrooptic devices, two techniques has been developed.

    The main geometrical and electrical parameters may be easily found by drawing lines in a developed graph, that is the basic of the new design technique.

    A new lift-off-etching technique was developed for fabricate thick electrodes.

    With these technique have been designed and fabricated electrooptics devices.