Research on performance of an integrated component with the three-electrode planar switch and the exploding foil bridge

• Autores: Jiao Li, Qingjie Jiao, Enyi Chu, Honghai Tong, Mi Zhou, Ying Wang, Guosheng Qin
• Localización: Microelectronics reliability, ISSN 0026-2714, Nº. 92, 2019, págs. 27-33
• Idioma: inglés
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• Resumen

  • In this paper, an integrated component of the three-electrode planar switch and the exploding foil bridge was fabricated on the ceramic substrate by the magnetron sputtering process and wet etching process, which was beneficial to the miniaturization, low energy and integration of the explosion foil initiator system. We discussed the self-breakdown voltage of the three-electrode planar switch under different structural parameters and established the formula of self-breakdown voltage. By testing the discharge performance of the integrated component under a charging voltage of 1300 V~1500 V, we obtained a delay time of about 300 ns for the component, which is lower than the delay time when the spark gap switch is used. This result showed that the inductance of the entire circuit was lower than the inductance of the conventional circuit. We conducted a preliminary study on whether the integrated components are affected by changing of the working environment. Finally, based on this integrated component, we have used LTCC technology to produce a new highly integrated EFI system.