Structural pattern extraction from asynchronous two-photon laser fault injection using spectral analysis

• Autores: V. Pouget, S. Jonathas, R. Job, J.R. Vaillé, F. Wrobel, F. Saigné
• Localización: Microelectronics reliability, ISSN 0026-2714, Nº. 76-77, 2017, págs. 650-654
• Idioma: inglés
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• Resumen

  • Abstract This paper presents a methodology for analysing two-photon absorption laser testing results in the frequency domain rather than with the classical mapping approach. We experimentally demonstrate, on a 28 nm device, the extraction of subwavelength dimensions from a noisy environment without requiring any synchronization between the test operations and the laser or the scan motion. A model of the experiment is then used to evaluate the impact of different parameters on the capabilities of the technique.