Resumen de Structural pattern extraction from asynchronous two-photon laser fault injection using spectral analysis

V. Pouget, S. Jonathas, R. Job, J.R. Vaillé, F. Wrobel, F. Saigné

• Abstract This paper presents a methodology for analysing two-photon absorption laser testing results in the frequency domain rather than with the classical mapping approach. We experimentally demonstrate, on a 28 nm device, the extraction of subwavelength dimensions from a noisy environment without requiring any synchronization between the test operations and the laser or the scan motion. A model of the experiment is then used to evaluate the impact of different parameters on the capabilities of the technique.